• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    A measuring device, particularly for the measurement of force, has a tilt-invariant interferometer attached to a bifurcated deformation body which consists of a base with one or several diaphragms attached thereon. The interference fringes are counted photoelectrically.
    公开号:SU1015317A1
    申请号:SU797770639
    申请日:1979-06-20
    公开日:1983-04-30
    发明作者:Герд Йэгер；Ханс-Иоахим Вендт；Зигфрид Хонекер；Клаус Иррганг；Волфганг Бернут
    申请人:Феб Комбинат Нагема (Инопредприятие)；
    IPC主号:
    专利说明:

    2. The device according to claim 1, wherein the deformation body consists of a base 6 and several rotor plates 7c and bending plates 7 at their free ends are rigidly connected between a communication element 15.
    3. The device according to claim 2, which is based on the fact that the point of application of force is provided on one of the bending plates 1-B.
    4. The device of claim 2, which is based on the fact that the point of imposition of force is provided on the communication element 15.
    . 5. The device according to PP. 1-4, characterized in that the base B and the coupling element 15 are made of silicon material, and the bending plates 7a, 7 are made of crystalline quartz.
    6. The device according to PP. 1-5, which means: between the base b and the hob plate, made of silicon material, mi 7hz, 76, a deformation body 8 is installed, made of high-quality material, such as crystalline quartz.
    7. The device according to paragraphs. 2-6, about t l. And fiaromeec by the fact that cargo. Column 10 is attached to the top
    a bending plate 1-8 by means of a kinematic guide 16 and to the lower bending plate 1-S by means of a momentless connection.
    8. Device on PP. 2-7, of which is due to the fact that in certain distances in the direction
    U provided some freight. columns 10, as well as joints
    9. The device according to paragraphs. 1-8, characterized in that the mirrors of the interferometer 4, 4-6 are rigidly connected to the optical divider 3.
    10. Device by PP. 2-.9, characterized in that the invariant non-tilting reflector 50 is located on the lower bending plate 7-6, and the second invariant non-tipping reflector 54 is installed on the upper bending plate T6 and the reflectors 5a, Bv are located parallel to the plane - - a plane diametrically with respect to the zero point of the coordinates in the possible minimum distance in the direction X from the communication element 15
    The invention relates to a device, in particular for digital measurement of force. In addition, with this device, displacement measurement values can be digitally measured, as well as all quantities produced from force and displacement.
    In accordance with the economic patent GDR 94905, a device for direct digital measurement of force is known, which contains a measurement element consisting of several rigid plates connected between each other. The magnitude of the force measurement is applied to one plate of the measuring element, the so-called bending plate. The air gap formed by this plate and the plate located opposite it is shaped in such a way that an interference distribution of the headland occurs during a deflection of the bending plate, as when the measuring element is illuminated with parallel monochromatic CM light. Certain areas of the interference distribution or turning lanes are deployed by photoelectric receivers. Optimal ratios are obtained in the case of the interference fringes turning from an oblique initial noisy at the beginning of the measurement range to a symmetrical with respect to the initial position of the final position at the end of the measurement range. By adjusting the receivers in direction V, the volume of characters for the measuring range is determined. By adjusting the distance of the receivers in the X direction, the desired position of the phases of the source signals can be achieved. The amount of supply of gears corresponding to the measuring range is determined by -B. this device is the distance of the location of the unfolding of the chemical from the x-axis.
    However, this matching changes in the case, for example, of changes in relative positions between the measurement element, the optical system of the image and the photoelectric receiver due to temperature fluctuations.
    The distance of the interference fringes in the direction due to the distribution of the headlands remains
    constant, and in the y direction varies with the value of the measurement value. Thus, the amount of interference fringes produced is limited
    the distance of interference fringes, defined by e1: 1m photoelectric method. , If the force is not placed in the central point of the bending plate, a bending plate twist occurs, as a result of which the interference fringes in the X direction and, therefore, the difference between the output signals will change. The rigidly formed plates forming the measurement element must be made of high-quality and transparent material. In addition, the plates must be of high surface quality and dimensioned so that the desired air gap geometry can be achieved. It is impossible to manufacture a deformation element from one piece, since the air gap of the surface must be polished. The invention makes it possible, mainly, to keep the distance of interference fringes constant over the entire measurement range and to establish it in any way, taking the relative changes in the position between the measurement element (deformation element), the optical system of the image and the photoelectric receiver have no effect nor does the matching of the stock of characters with the volume of the range, and the twisting of the bending plate does not affect the difference in the phases between the output signals, the device allows for ue opaque material to the element deformation tsyi. The deformation element is characterized by a simple construction. In addition, it is possible to save high-quality material for the deformation element, change the measuring range in a simple way, as well as achieve optically independence from the angular load. The object of the invention is to create a device, mainly for digital measurement of force, having short measurement times and high resolution. The problem according to the invention is solved by placing an interferometer invariant against tilting on a deformed element | forked. The design of the deformation element is also possible in the form of an annular or frame spring. The forked deformation element consists of a rigidly bending base and one or several bending plates, the base in one place rigidly fixed in the frame. The base and bending plates can be made in the usual way from a single piece, for example, high-quality spring steel or quartz. There are several possibilities for saving high-quality material of the deformation element. Either only bending plates are made of high-quality material and are firmly attached to rigid plates. bending with the base, or additional intermediate parts added to the bending plates, which are shaped in such a way that they take on the largest part of the deformation. In the latter case, only intermediate parts for the deformation element should be made of high-quality material. Especially, it is the manufacture of intermediate parts from crystalline quartz, and the base, like the bending plates, from silicon material. If several bending plates are installed, the latter at their free ends are rigidly connected by a communication element. The measured force can be superimposed on one of the outer bending plates or on the element of communication. . In the case of a device with several bending plates, it is possible to use bending plates simultaneously as a parallel transfer lever for a force-entry system. The load column is connected directly to the bending plates. At one point of attachment, a force is transmitted to the Deformation element. This attachment point must be shaped so that it does not convey moments. In another place, the load column is connected to one bending plate using a kinematic guide. The kinematic guide must be shaped in such a way that it can transmit only moments that are neglected. . . By changing the distance of the invariant tilting of the reflector of the bending plate from the clamping point of the bending plate, you can set the desired measurement range. By installing several cargo columns with different distances by measuring the rearrangement of the weighing pan, a measuring system of several bands can be obtained. Optical parts of the interferometer-invariant interferometer of known construction are rigidly connected with the deformation element. May be, for example, a Michelson interferometer is used, and the branch x of which is implemented to change the course of the beam invariant from tilting (for example triple) prisms. The optical divider and both mirrors of the interferometer, as well as the invariant tilting reflector, are rigidly combined with the base. It is advisable to fix the interferometer mirrors on the optical divider, since the production implementation of this process is easy, and the final design is rigid. Another tilt-invariant reflector is rigidly connected to the bending plate. During deflection of the bending plate, due to the applied forces, only the optical path in the branch of the interferometer changes, but the directions arising in the invariant from tilting reflectors of the rays, as well as those reflected by the reflectors of rays, change. The distance of the interference bands is determined by the position of the corners of both interferometer mirrors attached to the optical divider. Using a monochromatic light source and a capacitor, a parallel monochromatic light is supplied to the optical divider. On the optical splitter, it is divided into two partial beams. The tilt-invariant reflectors change the directions of both partial beams. Then they arrive at the interferometer mirrors attached to the dividing dice, reflectors that are invariant from tilting are reflected or once more, are connected again, on the optical divider, and interfere. t. The number of interference fringes emanating at a certain change in the measurement value depends on the distance invariant from the tilting of the reflector of the bending plate from the center of the deflection. The lens depicts interference fringes on photovoltaic receivers. Photoelectric receivers should be adjusted only in the direction perpendicular to the interference fringes in order to obtain the desired phase difference. To implement the incremental method, the interference pattern is unfolded by the photovoltaic method at two 90 phase offset in phase. To reduce the sensitivity to the angular load, both the tilt-invariant reflector is flat (the wives are on both bending plates parallel to the il-Z plane, a plane diametrically to the zero point of the coordinates. The tilting-invariant reflectors should be installed as close as possible to the communication element and taking into account the position of the communication element in front of the bending elements. The invention is explained in more detail with the help of the embodiments. Fig. 1 shows a device with a base and one bending plate. Figure 2 shows a device with a base and two bending plates; Figure 3 shows the arrangement of interferometer parts to eliminate sensitivity to angular load. According to Figure 1, the deformation element is composed of a rigid bending base 6, bending plate 7a and a fixedly fixed intermediate element 8. The base b and the bending plate 7a are made of opaque quartz glass, and the intermediate element 8 is made of crystalline quartz. In intermediate element 8, a groove is milled so that the element receives the largest part of the deformation. Stage 6 in one place is rigidly attached to the frame 9. The optical divider 3 and the invariant tilting reflector 5 are rigidly connected to the base 6. On the optical divider 3, the interferometer mirrors 4a and 4i are installed. The tilting invariant reflector So is rigidly connected to the bending plate 7a. With the help of monochromatic light source 1 and condenser 2, parallel monochromatic light is supplied to the optical divider 3. On the optical divider 3, the parallel monochromatic light is divided into two partial beams. On the corresponding tilt-invariant reflectors 5a and 5b, the directions of both partial beams are reversed, the beams coming to the mirrors of the interferometer 4a and 4b, are reflected from them, the reflectors are invariant from tilting 5a and 5 again, connected again on the optical divider 3 and interfere. The lens 11 produces a projection of the interference effect on the photoelectric receivers 12, to which the pulse formation stages 13 and the forward and reverse counter 14 are connected. The force p is directed through a force input system consisting of a weighing pan 20 and a cargo column 10, parallel to the transfer lever 18 and the connecting element 19 on the bending plate 7a. With an increase in force G, the bending plate 7a bends and, on the photoelectric receivers 12, interesting bands appear. The number of passing interference fringes is read from the forward and reverse counter 14 and serves to measure the value of the needle. According to FIG. 2, the ends of the hygienic plates 7-6 are connected by the communication element 15. The optical structural elements of the interferometer are exactly the same as in the device according to FIG. The photoelectric powder is produced in the same way. The force F is transmitted through the cargo column 10 to the lower bending plate 7-b using one thrust bearing 17. With the upper bending plate 7 the cargo column 10 is connected using a kinematic guide 16. The upper and lower bending plates 7 are simultaneously parallel to the transfer lever 18. In this example, two cargo columns 10 are placed. By rearranging the weighing pan 20, a force measuring system with two measuring ranges is obtained. On fig.Z shows the section aa in figure 2 with a modified location
    I,. five
    ten
    Vf
    ff optical interferometer parts. In this special device, which implements the insensitivity of the k-angular load, one tilt-invariant reflector 5ci is fixed on the lower bending plate 7, and the other tilt-invariant reflector 50 is fixed on the upper bending plate 7-8. The tilt-invariant reflectors 5o and Sg are located parallel to the plane - 1 plane diametrically to the zero point of the coordinates, and the minimum possible distance from the communication element 15 in the X direction. An additional swivel mirror 21 is provided for measuring the direction of the rays of the beams. It is recognized as an invention according to the results of the examination carried out by the Office for the Invention of the German Democratic Republic.
    权利要求:
    Claims (10)
    [1]
    Ί. DEVICE, IN PARTICULAR,
    FOR DIGITAL MEASUREMENT OF POWER, consisting of a deformation element, an interferometer with an optical divider, fixed and moving invariant. from the overturning of reflectors, a monochromatic light source, optical systems of photovoltaic detectors, cascades of pulse formation and a forward and reverse counter, characterized in that a deformation body made of one piece, for example, of quartz, consists of a rigid base bending 6 attached rigidly in the frame 9, on which the optical divider 3 and the mirrors of the interferometer 4a, 4-6 are rigidly mounted, as a tilt-invariant reflector 5, as well as from one bending plate 7a to which rilagaetsya measured force and which is rigidly invariant tipping reflector
    [2]
    2. The device according to π. 1, it is noteworthy that the deformation body consists of a base 6 and several Bending plates 7c and bending plates 7 at their free ends are rigidly connected to each other by a coupling element 15.
    [3]
    3. The device according to p. 2, about t π η-
    [4]
    4 and further that the point of application of force is provided on one of the bending plates 7-8.
    4. The device according to claim 2, wherein the point of application of force is provided on the communication element 15.
    [5]
    5. The device according to paragraphs. 1-4, characterized in that the base b and the coupling element 15 are made of silicon material, and the bending plates 7a, $ 7 are made of crystalline quartz.
    [6]
    6. The device according to paragraphs. 1-5, with the exception of those: that between base 6 and those made of cream. bending material 7o, 78, a deformation body 8 is installed, made of high quality material, for example, crystalline quartz.
    [7]
    7. The device according to paragraphs. 2-6, for example, in that the load column 10 is connected to the upper bending plate 7 ^ by means of a kinematic guide 16 and to the lower bending plate 7-8 by means of a torqueless connection.
    [8]
    8. The device according to paragraphs. 2-7, from πη4 and the fact that at certain distances in the direction
    X provides several cargo · 10 columns, as well as points of accession.
    [9]
    9. The device according to paragraphs. 1-8, characterized in that the mirrors of the interferometer 4A ·, 4-6 are rigidly connected to the optical divider 3.
    [10]
    10. The device according to paragraphs. 2-9, characterized in that the tilt-invariant reflector 5cv is located on the lower bending plate 7- / , And the second tipping-invariant reflector 5-4 is mounted on the upper bending plate 78 and the reflectors 5a, 5b are installed in parallel to the plane -2 of the plane diametrical with respect to the zero point of coordinates in a possibly minimum distance pr in the X direction from the communication element 15. ·
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    同族专利:
    公开号 | 公开日
    DE2919699A1|1980-01-24|
    HU182657B|1984-02-28|
    DD137619A1|1979-09-12|
    CH643949A5|1984-06-29|
    US4286879A|1981-09-01|
    DE2919699C2|1988-08-25|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    DE4132110A1|1991-09-26|1993-04-01|Siemens Ag|Optical force sensor load cell with interferometer - has elastically deformable body forming symmetrical force sensor with interference suppressed by opposite influences on distances between plate and discs|US1159416A|1914-11-25|1915-11-09|Timothy B Powers|Weighing-scale.|
    US3409375A|1964-10-21|1968-11-05|Cutler Hammer Inc|Gauging interferometer systems|
    US3622244A|1970-01-29|1971-11-23|Optomechanisms Inc|Dual axes interferometer|
    DD94905A1|1971-09-06|1973-01-12|
    DD111993A1|1974-05-13|1975-03-12|
    DE2658629C2|1976-12-23|1979-02-15|Sartorius-Werke Gmbh , 3400 Goettingen|Force measuring or weighing device|DD211168A1|1982-11-01|1984-07-04|Tech Hochschule|DEVICE FOR MODULATING OPTICAL GEAR DIFFERENCES|
    US4815855A|1986-07-03|1989-03-28|The United States Of America As Represented By The Secretary Of The Air Force|Interferometric load sensor and strain gage|
    CA2097781A1|1993-06-04|1994-12-05|Peter O. Paulson|Apparatus and method for non-destructive testing of structures|
    US5446546A|1993-07-02|1995-08-29|The Boeing Company|Laser interferometric single piece force transducer|
    EP0893669B1|1997-07-21|2002-06-12|European Atomic Energy Community |Device and method for measuring deformation of a mechanical test specimen|
    US7518731B2|2005-02-01|2009-04-14|Chian Chiu Li|Interferometric MOEMS sensor|
    WO2006110532A2|2005-04-07|2006-10-19|Photonic Associates, Llc.|Precise rotational motion sensor|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DD20663278A|DD137619A1|1978-07-11|1978-07-11|DEVICE, ESPECIALLY FOR DIGITAL FORCE MEASUREMENT|
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